Hybrid Metrology System_SHENZHEN MANST TECHNOLOGY CO., LTD.

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Coating Core Components, Lithium-Ion Battery Coating, Pan Semiconductor Coating, Hydrogen Fuel Cell Coating, Ultrasonic Surface Density Measurement Gauge

Home Product & Solutions Metrology Solution Suite Hybrid Metrology System Product Series

Hybrid Metrology System
Multi-channel Thickness Scanner

Supports multi-axis motion with high-precision marble motion platforms for high repeatability. Compatible with both spot measurement and scanning modes to meet diverse customer needs. Applicable for offline sample inspection in laboratories or process departments, as well as crystalline silicon thickness measurement in the semiconductor industry and thickness measurement of pouch cells & battery casings in the lithium battery industry.
Detailed Introduction

Product advantages

1、Comprehensive functionality covers mainstream industrial applications. Displays real-time cross-sectional thickness curves and histograms for single/multiple scans, longitudinal measurement averages with time-series trendlines；
2、Provides stable measurement systems with -friendly interfaces. Algorithms are continuously optimized through field validation, ensuring strong applicability and broad compatibility across industries；
3、SPC statistical analysis enables quality control monitoring；
4、Features patented Auto-MSA technology enabling one-click measurement system analysis. Automatically outputs GRR and R² metrics through autonomous data collection, minimizing human-induced errors；
5、Enables closed-loop control with real-time adjustments for cost efficiency. Synchronizes detection and production equipment operations in real-time, achieving synchronized operation and equipment status alerts；
6、CE and UL certified for overseas export

Product Parameters
Hybrid Thickness Gauge

Designed for coating thickness measurement on metal substrates in slurry deposition processes, this system performs non-destructive thickness inspection.
Detailed Introduction

Product advantages

1、Non-contact measurement eliminates surface damage；
2、Real-time process monitoring reduces manual checks and improves cost efficiency；
3、Independently measures metal substrate displacement and coating surface displacement, with data processed via software for direct thickness output；
4、Independently measures metal substrate displacement and coating surface displacement, with data processed via software for direct thickness output

Product Parameters
Wave Edge Detection Gauge

Designed for lithium battery laboratories or process engineering departments, this system provides offline inspection of slit electrode foils while outputting quantifiable data on slit edge snaking, ceramic coating edge waviness, and Z-directional height undulation to deliver actionable insights for precision process control.
Detailed Introduction

Product advantages

1、Ensures consistent sample placement via tension load cell feedback；
2、Measures slit edge snaking magnitude and counts out-of-spec occurrences；
3、Quantifies coating/ceramic edge waviness and tallies non-conformities；
4、Assesses Z-directional warpage magnitude and records tolerance violations

Product Parameters
Offline Thickness & Length Meter

Designed for laboratory sample offline inspection, this product enables rapid thickness and dimensional measurements. It performs non-contact NDE for precision characterization of tapered areas, ceramic AT9 regions, coating dimensions, and front/back coating edge alignment.
Detailed Introduction

Product advantages

1、Material zone thickness measurement
2、Tapered area thickness/detail characterization
3、Ceramic edge thickness profiling
4、Tab/coating dimensional inspection
5、Front/back edge alignment verification

Product Parameters
Laser-XRay Hybrid Thickness Gauge

Targeting laboratory and process department offline inspection scenarios, this solution leverages non-contact NDE, high-precision data acquisition, and multidimensional characterization to deliver specialized measurement capabilities for lithium battery, semiconductor, and metal coating industries, covering sample thickness, dimensional measurements, detail feature analysis, edge morphology assessment, and scenario-specific requirements, enabling precision process control and elevated inspection efficiency.
Detailed Introduction

Product advantages

1、Featuring a high-precision C-frame scanning mechanism, this system delivers structural rigidity and high-accuracy measurement capabilities；
2、The high-sampling-rate radiation detector enables precise measurement of electrode sheet areal density, with laser spot size ≤0.03mm. It accurately detects fine features of electrode sheets and achieves 0.1mm thickness contour detection in tapered areas and ceramic AT9 regions

Product Parameters